| PowerPC Chip | 603 | 603e |
| Technology | 0.5 micron CMOS process | 0.5 micron CMOS process |
| Die Size | 7.4mm x 11.5mm (85mm^2) | 8.4mm x 11.67mm (98mm^2) |
| Transistors | 1.6 million | 2.6 million |
| Cache | 16K Split | 32K Split |
| Temp. Range | 0-105 deg. C | 0-105 deg. C |
| Performance | 75 SPECint92 @ 80 MHz | 120 SPECint92 @ 100 MHz |
| 65 SPECfp92 @ 80 MHZ | 105 SPECfp92 @ 100 MHz | |
| 62 SPECint92 @ 66 MHz | ||
| 54 SPECfp92 @ 66 MHz | ||
| Signal I/Os | 165 | 165 |
| Power Supply | 3.3V +/- 5% | 3.3V +/- 5% |
| Power Dissipation | 2.5W @ 80 MHz | 3W @ 100 MHz |
| 2.2W @ 66.67 MHz | ||
| Packaging | C4 Ceramic quad flat pack (240 pins) | C4 Ceramic quad flat pack (240 pins) |